| 发明名称 |
Accumulator for slurry sampling |
| 摘要 |
A fluid collection apparatus having an accumulator for contacting a polishing surface of a polishing pad and collecting fluid from the polishing pad, a reservoir for receiving fluid from the accumulator, and a volume maintainer for maintaining a set volume of fluid in the reservoir.
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| 申请公布号 |
US6176765(B1) |
申请公布日期 |
2001.01.23 |
| 申请号 |
US19990250308 |
申请日期 |
1999.02.16 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LI LEPING;GILHOOLY JAMES A.;LIPORI ROBERT B.;MORGAN, III CLIFFORD O.;SUROVIC WILLIAM J.;WEI CONG |
| 分类号 |
B24B37/04;B24B57/02;(IPC1-7):B24B29/00 |
主分类号 |
B24B37/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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