| 发明名称 |
Grindstone having a vacuum system in a pin chuck stepper |
| 摘要 |
A grindstone having a vacuum system is applied to a pin chuck stepper. The vacuum system has a vacuum tube attached on the edge of the grindstone. When the grindstone moves on a pin chuck stage on the pin chuck stepper, the vacuum tube vacuums the pin chuck stage to free particles on the pin chuck stage.
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| 申请公布号 |
US6176770(B1) |
申请公布日期 |
2001.01.23 |
| 申请号 |
US20000494522 |
申请日期 |
2000.01.31 |
| 申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
KAO CHUNG-HSIEN;CHENG PATRICK;LEE LI-CHUNG;CHEN MEI-LING |
| 分类号 |
B24B55/10;B24D15/02;G03F7/20;(IPC1-7):B24B55/06 |
主分类号 |
B24B55/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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