发明名称 PLANE LAPPING DEVICE
摘要 PROBLEM TO BE SOLVED: To attain improvement of surface smoothness of a workpiece obtained by polishing work, by forcedly loading a load of a weight to a workpiece abutting a polisher slope, applying a high polishing pressure to the workpiece, and swiveling the workpiece on the polisher surface at lapping time. SOLUTION: A work station positioning mechanism comprises a frame 13a, handle 13b, work station support shaft 13c, longitudinal direction position adjusting slide plate 13d of this support shaft 13c, frame support shaft 13e, drive mechanism reciprocation moving (swivel) simultaneously the work station support shaft 13c and a work station, Western style bow-shaped pawl fixed to a shaft suspended from the work station support shaft 13c, and a pair of driven rotary rolls provided in the pawl. A load of a weight 14b of the work station is dispersed in a pair of connection bolts and loaded to a work jig.
申请公布号 JP2001018160(A) 申请公布日期 2001.01.23
申请号 JP19990191163 申请日期 1999.07.06
申请人 OKAMOTO MACHINE TOOL WORKS LTD 发明人 KOBAYASHI KAZUO;INOUE TAKESHI
分类号 B24B53/017;H01L21/304 主分类号 B24B53/017
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