发明名称 METHOD FOR MANUFACTURING SINGLE CRYSTAL MEMBER
摘要 PROBLEM TO BE SOLVED: To provide a manufacture method for directly obtaining a single crystal member capable of being used as a single crystal substrate without passing through processes for cutting, grinding and the like. SOLUTION: This method for manufacturing a single crystal member comprises forming an amorphous film 2 on a single crystal substrate 1, selectively removing the surface of the single crystal substrate 1 by photolithography to form windows 3, bringing the windows 3 into contact with a supersaturated solution supersaturatedly containing a prescribed element to allow the epitaxial growth of single crystals 4 containing the element as a constituent in the direction vertical to the surface of the single crystal substrate 1 as seed crystal portions, and then stopping the contact of the single crystals with the supersaturated solution 5 to stop the epitaxial growth, thus obtaining the single crystal member having prescribed size and shape.
申请公布号 JP2001019589(A) 申请公布日期 2001.01.23
申请号 JP19990193953 申请日期 1999.07.08
申请人 UNIV TOKYO 发明人 NISHINAGA SHO
分类号 H01L21/20;C30B19/04;C30B19/12;C30B29/66 主分类号 H01L21/20
代理机构 代理人
主权项
地址