METHOD OF LOW TEMPERATURE SYNTHESIS OF CARBON NANOTUBE USING CATALYST METAL FILM FOR DECOMPOSITION OF CARBON SOURCE GAS

摘要

PROBLEM TO BE SOLVED: To provide a method for the low temperature synthesis of carbon nanotubes using a catalyst metal film. SOLUTION: After a catalyst metal film is formed on a substrate, the catalyst metal film is etched to form nanometer size catalyst metal particles separated from one another. Then a carbon nanotube is grown on each nanometer size catalyst metal particle separated from one another by a thermochemical vapor phase vapor deposition method to pyrolyze a carbon source gas at a temperature lower than the deformation temperature of the substrate by using the catalyst metal film for the decomposition of the carbon source gas. Thus, a plurality of carbon nanotubes perpendicularly arranged on the substrate are formed.