发明名称 Semiconductor device using dummy pattern to preserve pattern density
摘要 In a memory cell section of a memory cell array in a semiconductor memory, N+ diffused layers and gate electrode conductors are located with the same line width and with an equal spacing. In a selector section, the N+ diffused layers and the gate electrode conductors are not located with an equal spacing. However, a dummy N+ diffused layer is added to an end of the N+ diffused layer in the selector section. In addition, a dummy N+ diffused layer is additionally located in a region which had existed as an empty region corresponding to the N+ diffused layer in the memory cell section. Thus, a resist pattern for the N+ diffused layers is formed as a designed pattern, and the characteristics of memory cell transistors or selector transistors is homogenized.
申请公布号 US6177693(B1) 申请公布日期 2001.01.23
申请号 US19980162886 申请日期 1998.09.30
申请人 NEC CORPORATION 发明人 OTSUKI KAZUTAKA
分类号 G11C11/34;H01L21/8246;H01L27/02;H01L27/10;H01L27/105;H01L27/108;H01L27/112;(IPC1-7):H01L27/108;H01L31/119;H01L31/113 主分类号 G11C11/34
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