CARRYING DEVICE OF SPHERICAL OBJECT AND ATMOSPHERE CONVERTING METHOD OF SPHERICAL OBJECT

摘要

PROBLEM TO BE SOLVED: To convert an atmosphere while carrying a spherical object such as spherical monocrystal silicon at a high speed by contacting a spiral flow with a first atmosphere including the spherical object, diffusing the first atmosphere by selectively sucking the first atmosphere to the outside, and sending out the separated sphercal object to the next process in a second atmosphere. SOLUTION: Reaction gas including monosilane and N2O gas and including a monocrystal silicon ball having a diameter of about 1 mm is blown into an exhaust chamber 22 formed in a suction/exhaust part 20 of a carrying device put in a negative pressure state by a recovering pump 24 from an inner tube 12 from an oxide film forming process using a CVD method to be contacted with a spiral flow generated by a spiral flow forming part 10 having high pressure gas supply ports 15a, 15b formed in the tangent direction to duffuse the reaction gas by adiabatic expansion to be sucked by the recovering pump 24 to be exhausted to a recovering tank. The reaction gas-removed silicon ball is then accelerated by a pulse of carrier gas composed of inert gas in a sending- out part 30 to be sent out to the next process.