发明名称 Low loss capacitor structure
摘要 A capacitor structure (100) including first and second capacitor plates (102, 106) insulatingly spaced from each other by a capacitor dielectric (102). A first set of conductive posts (301) electrically couple to the first capacitor plate (102) and extend away from the capacitor dielectric (104). A first conductive structure (302) comprising a material with lower resistivity than the first capacitor plate (102) is electrically coupled to the first set of conductive posts (301). In a preferred embodiment, a second set of conductive posts (501) are electrically coupled to the second capacitor plate (106) and extend away from the capacitor dielectric (102). A second conductive structure (503) is electrically coupled to the second set of conductive posts (501).
申请公布号 US6177716(B1) 申请公布日期 2001.01.23
申请号 US19970000510 申请日期 1997.12.30
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 CLARK CHARLES FRANCIS
分类号 H01L21/02;H01L27/08;(IPC1-7):H01L29/00 主分类号 H01L21/02
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