| 摘要 |
PROBLEM TO BE SOLVED: To make a deformation efficiency by a unimorph effect close to a maximum value. SOLUTION: A pit 205b is formed to a join part of a diaphragm 205 to a piezoelectric element 206. A guide part 107 for positioning the piezoelectric element 206 to a pressure chamber 104 is formed to a part of the pit 205b separated from the pressure chamber 104. A positioning accuracy of the piezoelectric element 206 to the pressure chamber 104 is enhanced accordingly.
|
