发明名称
摘要 The present invention resides in an elevator mechanism comprising a base plate defining the bottom wall of a chamber disposed above the base plate. The base plate has a top surface and a bottom surface with an opening therein communicating between the top and bottom surfaces. A first drive is disposed below the base plate for linear movement parallel to a first given direction. A carriage is connected for movement to the first drive and carries a lift tube extended upwards from the carriage along the given direction and through the opening in the base plate. The lift tube including a coaxially disposed rotary shaft therewithin. A second drive having an output is provided and is supported on the carriage parallel to the given direction and spaced from the rotary shaft in a side-by-side orientation. A coupling is also provided for drivingly connecting the output of the second drive to the rotary shaft.
申请公布号 JP2001501038(A) 申请公布日期 2001.01.23
申请号 JP19980515633 申请日期 1997.08.29
申请人 发明人
分类号 B65G49/07;B66B9/02;F16H25/20;H01L21/00;H01L21/677;H01L21/687;(IPC1-7):H01L21/68 主分类号 B65G49/07
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