SYNTHESIS OF CARBON NANOTUBE

摘要

PROBLEM TO BE SOLVED: To provide a method for the mass-synthesis of high purity carbon nanotubes perpendicularly arranged on a large area substrate by thermochemical vapor phase vapor deposition method. SOLUTION: After catalyst metal particles of a nanometer size are formed as separated on a substrate by an etching process (step 30), high purity carbon nanotubes perpendicularly arranged on the substrate are grown by a thermochemical vapor phase vapor deposition method using a carbon source gas (step 40). Then after the step of selective synthesis of carbon nanotubes, carbon nanotubes are purified in-situ (step 60).