| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room which provides a good space efficiency in an entire facility by minimizing additional spaces (attic space, underfloor space). SOLUTION: This semiconductor manufacturing factory 10 has: a clean room 12; an attic space provided on the ceiling side of the clean room 12 for supplying air into the clean room 12; a fan-equipped high-performance filter for removing dust from the air supplied into the clean room 12 and for force-feeding air into the clean room 12; an underfloor space located below the floor of the clean room 12; and a return space for allowing air flowing into the underfloor space to return into the attic space. A return shaft that is easy to mount and remove, for communicating the attic space to the underfloor space, is provided in an appropriate portion of the clean room 12.
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