Process for recycling reaction system of electroplating passivation of wafers

摘要

A process for recycling a reaction system of electroplating passivation of wafers, in which lanthanum hydroxide (La(OH)3) or magnesium hydroxide (Mg(OH)2) is added to supplement the lanthanum ion or magnesium ion consumed in an electroplating solution when the pH of the electroplating solution decreases to a range from 0.1 to 0.4.