| 摘要 |
PROBLEM TO BE SOLVED: To stabilize operation even when a lighter-weight, smaller-sized and/or thinner piezoelectric actuator is used by forming slits between an elastic member and a support member inside the elastic member and elastically vibrating the elastic member in the thickness direction through excitation of the piezoelectric body, in such an actuator. SOLUTION: In this piezoelectric actuator 10, a concentric-disklike piezoelectric body 2 with respect to a disklike elastic body 1 is stuck to a circular setting surface 1d of the upper side of the disklike elastic body 1 in the thickness direction, to form a vibrator 3 consisting of the elastic body 1 and piezoelectric body 2. Also, slits 1a are formed through both the surface and rear of the elastic body 1 between the elastic body 1 and a doughnut-like support 1c on the periphery of the elastic body 1 inside it. Further, the piezoelectric body 2 is stuck to only the circular setting surface 1d, and the setting surface 1d and the doughnut-like support 1c are connected through belt-like beams 1b each having a joining part for joining the beam 1b to the support 1c and another joining part for joining the beam 1b to the setting surface 1d, wherein each of these joining parts is formed so that its thickness is smaller than its width in the radial direction of the setting surface 1d, to amplify excitation of the piezoelectric body 2. Thus, the elastic body 1 is elastically vibrated in the thickness direction of the piezoelectric body 2 by excitation of the piezoelectric body 2. |
