| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve reliability and productivity of film forming. SOLUTION: A laser beam machining device 1 forms a film on an object A to be machined by irradiating the object to be worked with laser beams (a), (b) emitted from laser beam oscillators 2a, 2b and transmitting an aperture 9 and by supplying a raw material gas for film forming. The device 1 is provided with an image pickup device 5 to pick up the image of a face to be machined of the object to be machined as well as the region including a beam irradiation position and a controller to control a beam transmitting position and beam intensity for the aperture of the laser beam (b) on the basis of the photograph signal from the photograph device 5.</p> |
