| 摘要 |
measurement technology. SUBSTANCE: invention can find use in particular in navigational gyroscopic devices, in inertial systems of mobile objects, in automatic pilots of aircraft and ship models, in safety systems of vehicles. Proposed measurement unit includes micromechanical vibration gyroscopes-accelerometers with electrodes of initiation of vibrations and pick-off of information from sensitive elements and temperature- sensitive element put on base attached to substrate. Substrate comes in the form of double-sided dielectric board, base in manufactured in the form of regular hexagon truncated pyramid whose three sides carry sensitive elements of gyroscopes- accelerometers and whose face side carries temperature-sensitive element. Base is fixed in central part of substrate along plane of major face side and microassemblies of servicing electronics are mounted around base on periphery of substrate and are produced in accord with thin-film technology. EFFECT: substantially reduced mass and size characteristics, simplified procedure of referencing of sensitivity axes of gyroscopes-accelerometers to base of unit, increased operational reliability thanks to enhanced probability of detection and identification of failures with simultaneous rise of measurement precision. 2 cl, 4 dwg
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