| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacturing apparatus of a semiconductor device which facilitates experimentally manufacturing work of the semiconductor device. SOLUTION: An operation panel is provided with an application switch 90 for applying a photoresist to a semiconductor wafer, an exposure switch 92 for aligning the photoresist and a developing switch 94 for developing the photoresist and is connected with a control unit 98. One or two continuing treatments among the three treatments of applying, exposing and developing of the photoresist can be executed selectively by operating these switches. |
