| 摘要 |
PROBLEM TO BE SOLVED: To automatically, accurately return to the original observing position after moving a sample or image. SOLUTION: In this apparatus, when observing an image on the original position after having observed a sample or image by rotating or moving it, an operating means 26 instructs to return the image. According to this instruction, a CPU control circuit 18 reads out stored history data on the rotation and movement of the sample or image from a memory 27. For example, when a sample 2 has been rotated mechanically, according to the data from the memory 27 on the rotated amount or rotated direction, the CPU control circuit 18 controls an R-movement drive circuit 23 to rotate a stage 21 by a predetermined amount in the rotational direction inverse to the previous rotation. Consequently, the sample can return to the state before rotated.
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