| 摘要 |
PROBLEM TO BE SOLVED: To provide an eccentricity-measuring device that can measure the eccentricity of various kinds of lenses to be inspected by using an aspherical wave generation optical system without causing any principle errors, is in wide use, has high mechanical reliability and improved operability, and is in a simple configuration, and its measurement method. SOLUTION: A cylinder L3 with an inner-periphery surface for mirror-surface reflection and a spherical surface wave generation optical system L2 that is arranged on the extension of the center axis of the cylinder and applies the spherical surface wave into the cylinder are provided, an aspherical wave being generated by reflection in the cylinder and a spherical wave that passes through the inside of the cylinder are applied to a lens L4 to be inspected, interference fringes being generated in a plurality of zones existing on one or a plurality of surfaces to be inspected of the lens or interference fringes being generated in both of the surface to be inspected on the surface of the lens and the surface to be inspected of a reverse side for reflecting light through the inside of the lens are subjected to one-color adjustment, and the light axis of the surface to be inspected is matched to the center axis of the cylinder, thus measuring the eccentricity of the light axis of the lens L4.
|
