PRODUCTION OF NONLINEAR OPTICAL THIN FILM

摘要

PROBLEM TO BE SOLVED: To enhance a nonlinear optical characteristic of an SiO2-GeO2 thin film. SOLUTION: The SiO2-GeO2 thin film 12 is formed on a glass substrate 10 and thermal poling to impress an electric field E is executed while impressing heat with a heat source 16 to orient GeE', by which the nonlinear optical characteristic is developed. The atmosphere of the thermal poling is formed of a gaseous mixture composed of argon and oxygen and the oxygen concentration is lowered, by which the decrease of oxygen deficiency type defects is prevented and the formation of the GeE' is promoted.