| 摘要 |
PROBLEM TO BE SOLVED: To improve an SN ratio by increasing a change in curvature of a reflecting interface and improving a light-condensing performance also to realize miniaturization and space saving. SOLUTION: This light modulation device has a piezo-electric element 30 consisting of a piezo-electric material layer 33 and a 1st- and a 2nd electrodes 32, 34 interposing it in-between, also a mirror element 20 having a mirror film structure 35 reflecting light, and a driving element 30 arranged corresponding to the mirror element 20. In this case, the piezo-electric element 30 is fixed on a substrate 11 via a supporting member 31a arranged on one of the faces, and connection wiring 36, 37 to be connected with the 1st- and the 2nd electrodes 32, 34 are arranged extending up to drive wiring 53, 54 provided on the substrate 11 via the supporting member 31a, and this arrangement makes it easier to connect the drive wiring 53, 54 with the connection wiring 36, 37.
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