| 摘要 |
PROBLEM TO BE SOLVED: To measure highly precisely perfluorocarbons having an approximate control concentration regardless of existence of a fluorine-based detergent. SOLUTION: A fist reaction furnace 1, a water scrubber means 4, water penetrating tubes 5, 8, a second reaction furnace 9, and a detector paper-type gas detecting device 12 which is an acid gas detecting means are connected in series, and a heating temperature of the first reaction furnace 1 is set at such a temperature that a fluorine-based detergent can be thermally decomposed and that perfluorocarbons are not denatured as much as possible, and a heating temperature of the second reaction furnace 9 is set at such a temperature that the perfluorocarbons are thermally decomposed. Only the fluorine-based detergent is thermally decomposed into acid gases by the first reaction furnace 1 and removed by the water scrubber means 4, and after removing excessive water in the perfluorocarbons passing through the water scrubber means 4, the perfluorocarbons are thermally decomposed surely into acid gases by the second reaction furnace 9.
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