PROBE AND NEAR-FIELD OPTICAL MICROSCOPE USING IT, AND INSPECTION METHOD USING THE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a probe for a near-field optical microscope capable of optically observing a recognition mark with high accuracy without influence of a structure such as an area step. SOLUTION: This probe is used for a near-field optical microscope for measuring a DVD-RAM 13 having a spiral land 15. A tip side periphery of a fiber 17 is coated with a metal film 18. An external diameter of the probe tip including the metal film 18 is larger than a distance between the radially adjacent lands 15 in a groove structure, i.e., a width of a groove 16, while the tip surface 12a of the probe is a flat surface. The tip surface 12a of the probe is coated with a metal film 18 so as not to expose the tip of the fiber 17.