| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxygen sensor element and its manufacturing method in which a heater is integrated with a cylindrical oxygen sensor, and whose activation time is short and whose durability and heat resistance is excellent. SOLUTION: An oxygen sensor is equipped with a cylindrical tube 2 which is made of a ceramic solid electrolyte having oxygen ion conductivity and whose one end is closed, and a standard electrode 3 and a measuring electrode 4 which are respectively formed at face-to-face positions on an inner surface and an outer surface of the cylindrical tube 2. A ceramic insulating layer 5 is layered so that a portion or the whole of the measuring electrode 4 is exposed on the outer surface of the cylindrical tube 2. A heating body 7 is set at least close to the measuring electrode 4 of the ceramic insulating layer 5. The cylindrical tube 2 and the ceramic insulating layer 5 in which the heating body 7 is set, are simultaneously formed by baking, and a ceramic porous layer 11 is depositely formed on the surface of the measuring electrode 4. |
