WAFER HOUSING CHAMBER AND METHOD OF STORING WAFER

摘要

PROBLEM TO BE SOLVED: To provide a wafer housing chamber capable of reducing a pressure difference between an inside sealed space and the outside while maintaining airtightness in the inside sealed space to prevent trouble due to the difference between internal and external pressures. SOLUTION: This wafer housing chamber 1 is provided with a pressure controlling mechanism 5 for automatically reducing a difference between pressures inside and outside a sealed space 22 formed by a case 2 and a chamber lid 3. This pressure controlling mechanism 5 is constituted by a diaphragm 53 and can change the internal volume of the sealed space 22 in response to a pressure change in the sealed space 22. The pressure control mechanism 5 can also be constituted by using bellows or combining a cylinder and a pressure control piston.