| 摘要 |
PROBLEM TO BE SOLVED: To easily detect a DUT(device under test) whose probe is broken. SOLUTION: The inspection result displaying apparatus includes two prober devices 10a and 10b, a workstation 30, and a personal computer 20. Based on a displaying program and a displaying mode switching program stored in a ROM 36 of the workstation 30, inspection results from the devices 10a and 10b are displayed on a CRT 22 of the computer 20 in a manner corresponding to the position of a DUT of interest on a wafer substrate, and a pass/fail percentage per DUT is displayed along wish these inspection results of the semiconductor chip of interest.
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