| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved charged particle beam column capable of inspecting at an inclined beam reach angle with high resolution of a charged particle image being maintained. SOLUTION: This column for directing a charged particle beam having a limited energy expansion on a sample surface at an inclined beam reach angle is provided with a particle supply source 12, an objective lens, a deflection unit 30 for deflecting the charged particle beam apart from an optical axis so as to generate a chromatic aberration by traversing the charged particle beam across the objective lens as deviated from the axis and a correction unit for substantially correcting color dispersion on the plane of the sample surface by dispersing the charged particle beam. The effect of combination of the objective lens and the deflection unit 30 directs the charged particle beam so as to impinge on the sample surface at a large beam reaching angle. |
