摘要 |
PROBLEM TO BE SOLVED: To eliminate influence of external electromagnetic waves by performing electromagnetic wave measurement aimed at an object to be measured and that aimed at external electromagnetic waves alone and computing a differential between the respective measurement data. SOLUTION: A probe driving device 11 moves an antenna probe 12 relatively to an object 18 to be measured for scanning it. In a storage device 16, data of frequency- to-electromagnetic wave intensity obtained by one scanning pass in a measurement set area over the object 18 to be measured is stored as a measurement data D1 for one scanning pass. In this process current supply to a printed circuit board assumed in the object 18 to be measured is stopped and measurement is carried out again for storing a measurement data D2 of a second scanning pass in the storage device 16. The first scanning data D1 and the second scanning data D2 are different from each other in a measurement time and power source supply to the object 18 to be measured. Consequently, when the measurement data D1, D2 stored in the storage device 16 are fed to a computing device 17, in which a differential between the measurement data D1, D2 is computed, only an external electromagnetic wave constituent is canceled from the both measurement data.
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