| 摘要 |
PROBLEM TO BE SOLVED: To determine whether foreign matter/defect is fatal or not during appearance inspection and to reflect the inspection result in a semiconductor device manufacturing process. SOLUTION: The appearance inspecting apparatus comprises a stage movable in both X and Y directions; a laser serving as a light source, a detector for detecting the scattered and diffracted light of a laser beam; a detected image comparison processing system 5 for receiving a signal from a chip for inspection which is assumed to have foreign matter/defect, and a signal from a chip for reference which is assumed to have no foreign matter/defect and comparing both receiving signals; a central processing system 9 for controlling movement of the stage and calculating the coordinates of the foreign matter/defect, to determine whether the foreign matter/defect is fatal or not; an inspecting apparatus displaying system 18 for displaying the result of the fatality determination; and an inspecting apparatus communication system 19 for transmitting data to an analyzer 50, which is an external device. As a result, it is determined whether or not the foreign matter/defect is fatal or not, and the result of the determination is reflected in a semiconductor manufacturing process.
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