CAPACITATIVE PRESSURE SENSOR AND CAPACITATIVE DIFFERENTIAL PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a capacitative pressure sensor or a capacitative differential pressure sensor that manufactures an electrode by a method being different from the silk screen printing method or sputtering. SOLUTION: The sensor includes a substrate 1 with first and second surfaces and/or a circumference surface, and a plate-shaped first electrode 14 made of a conductive material. The plate-shaped first electrode is airtightly fixed to a cutout part being formed on the first surface with high pressure resistance and high vacuum, and includes through connection 17 that passes through the substrate and is led to the second or circumference surface from the first electrode. Furthermore, the plate-shaped first electrode includes a diaphragm 2. The diaphragm 2 is fixed to the outside of the cutout part on the substrate by a second joint material 26 along a junction, the diaphragm itself forms the second electrode or is covered by a second electrode 24 on a surface facing the first electrode, and the second electrode passes through a junction 18 for connection.