| 摘要 |
PROBLEM TO BE SOLVED: To detect a failure of an integrated circuit without using a non-failure integrated circuit. SOLUTION: In this failure detection device, a conventional method selection means 1 inspects respective integrated circuits in an inspection target integrated circuit assembly 2 by a conventional method to select non-failure products. A power current spectrum measurement means 3 observes a power current spectrum of each the integrated circuit decided as the non-failure product by the conventional method selection means 1 in the inspection target integrated circuit assembly 2, and stores the spectrum into a memory means 7. A calculation means 6 calculates a means value and standard deviation of the power current spectra stored in the memory means 7, estimates a degree of a deviation of the power current spectrum of each the integrated circuit on the basis of a value gotten by normalizing the deviation of the power current spectrum of the integrated circuit from the mean value with the standard deviation, and detects a failure of each the integrated circuit on the basis of the normalized value stored in a normalized value storage means 5. A main control means 4 controls the whole device.
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