Verfahren zum Kleben von Mikrostrukturen

摘要

For the adhesive bonding of microstructures, with a liquid adhesive, the partners to be joined are initially positioned laterally and pressed together with a defined force. The liquid adhesive is either applied directly and externally at the bonding surface next to the joint zone to be carried through by capillary forces into the joint. The flow spread of the adhesive is blocked by a further groove.