| 摘要 |
<p>A method is provided for automatically creating a set of master recipes from a general recipe using site information. Each master recipe includes a plurality of recipe segments. The general recipe is independent of equipment. The method includes a first step of creating a list of recipe segments from the general recipe and the site information. The list of recipe segments includes each process action in the general recipe and a listing of all the corresponding recipe segments for that process action which can perform that process action in the process cell. The method includes a second step of creating the set of master recipes from the list of recipe segments, the general recipe, and the site information.</p> |
