HIGH-FREQUENCY DEVICE AND METHOD OF MANUFACTURE THEREOF

摘要

A high-frequency device comprises a multilayer substrate (100); a waveguide (102a) formed on an inner layer (101) of the multilayer substrate (100) to propagate high-frequency signals; a high-frequency moving part (102b) formed on the inner layer and capable of touching the waveguide; a space (113a) formed in an upper part of the high-frequency moving part and located higher than the range of movement of the high-frequency moving part. Thus, the high-frequency moving part can operate in the space, that is, the inner layer can include a high-frequency rotating part.