| 摘要 |
<p>The mass flow controller of the present invention includes a sensor (12). This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output (15) to an electronic control system (16) coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve (22) with a control signal to regulate a first gas flow through the control valve.</p> |
