SURFACE FLAW DETECTION USING SPATIAL RAMAN-BASED IMAGING

摘要

A Raman-based spatial analysis method of detecting surface flaws. Special filters and optics are used to acquire filtered Raman response data from a portion of the surface. The filtered Raman response data represents the Raman response of the surface at a selected frequency. A camera records the response, thereby providing a two dimensional image of the portion of the surface. The image may be analyzed to determine whether that portion has desired chemical characteristics. The method is especially useful during film deposition, where the analysis can determine whether the deposition process meets quality metrics and any flaws can be repaired. With the aid appropriate filters, the method can be applied to metallic as well as non-metallic surfaces.