发明名称 |
METHOD FOR CREATING MASTER RECIPES |
摘要 |
<p>A method is provided for automatically creating a set of master recipes from a general recipe using site information. Each master recipe includes a plurality of recipe segments. The general recipe is independent of equipment. The method includes a first step of creating a list of recipe segments from the general recipe and the site information. The list of recipe segments includes each process action in the general recipe and a listing of all the corresponding recipe segments for that process action which can perform that process action in the process cell. The method includes a second step of creating the set of master recipes from the list of recipe segments, the general recipe, and the site information.</p> |
申请公布号 |
WO0104712(A1) |
申请公布日期 |
2001.01.18 |
申请号 |
WO2000US18631 |
申请日期 |
2000.07.07 |
申请人 |
BRANDL, DENNIS;HALL, RAY;XI, XIAOJIN |
发明人 |
BRANDL, DENNIS;HALL, RAY;XI, XIAOJIN |
分类号 |
G05B19/418;(IPC1-7):G05B19/418;H01L21/00 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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