| 摘要 |
<p>A method for generating a valve drive signal using a variable gain PI controller in a mass flow controller. The integral function includes an integral gain factor which functions as the variable gain in the PI controller. For set-point signals less than a normalized predetermined percentage of the maximum set-point, the gain factor is equal to formula (I), where a is a first gain constant and B is a second gain constant. Otherwise, the integral gain factor is formula (II), where A is the first gain constant, B is the second gain constant, and x is the normalized set-point signal.</p> |
