发明名称 HIGH-FREQUENCY DEVICE AND METHOD OF MANUFACTURE THEREOF
摘要 <p>A high-frequency device comprises a multilayer substrate (100); a waveguide (102a) formed on an inner layer (101) of the multilayer substrate (100) to propagate high-frequency signals; a high-frequency moving part (102b) formed on the inner layer and capable of touching the waveguide; a space (113a) formed in an upper part of the high-frequency moving part and located higher than the range of movement of the high-frequency moving part. Thus, the high-frequency moving part can operate in the space, that is, the inner layer can include a high-frequency rotating part.</p>
申请公布号 WO2001004985(P1) 申请公布日期 2001.01.18
申请号 JP2000004241 申请日期 2000.06.28
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