发明名称 A flash memory array
摘要 <p>A layout and method for FLASH memory with no SAS process. The layout involves a source contact (91) that connects the source regions of a series of memory cells (11) and forms the source line (24). The source contact is formed using a hard mask insulator layer (100) as a part of the memory cell gate stack (110), (115) which insulates the control gate (18) during source contact (91) formation. <IMAGE></p>
申请公布号 EP1069620(A1) 申请公布日期 2001.01.17
申请号 EP20000305876 申请日期 2000.07.12
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MEHRAD, FREIDOON;XIA, JIE;AMBROSE, THOMAS M.
分类号 G11C16/16;H01L21/8239;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115;H01L21/824 主分类号 G11C16/16
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