| 发明名称 |
Radiation sensitive composition |
| 摘要 |
<p>A radiation sensitive composition comprising (A) a copolymer comprising recurring units of a p-hydroxystyrene unit and a styrene unit having an acetal group or a ketal group at the p-position, (B) a copolymer comprising recurring units of a t-butyl (meth)acrylate unit and a p-hydroxystyrene unit, and (C) a radiation sensitive acid-generating agent.</p> |
| 申请公布号 |
EP0793144(B1) |
申请公布日期 |
2001.01.17 |
| 申请号 |
EP19970103386 |
申请日期 |
1997.02.28 |
| 申请人 |
JAPAN SYNTHETIC RUBBER CO., LTD. |
发明人 |
IWANAGA, SHINICHIRO;SAKURAI, AKIHIKO;TANABE, TAKAYOSHI;TSUJI, AKIRA |
| 分类号 |
G03F7/004;(IPC1-7):G03F7/004 |
主分类号 |
G03F7/004 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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