发明名称 Fabrication of self-assembled monolayers
摘要 <p>A self-assembled monolayer (SAM) is fabricated using either a semi-fluorinated sulphur containing compound, or a sem-fluorinated silane derivative and compressed carbon dioxide (CO2) as the solvent medium. The temperature and/or pressure of the compressed CO2 may be varied during the fabrication process to improve the molecular packing density of the monolayer. By using compressed CO2 as the solvent medium, monolayers with good molecular packing density can be fabricated relatively quickly without the use of environmentally unfriendly solvents.</p>
申请公布号 GB0029535(D0) 申请公布日期 2001.01.17
申请号 GB20000029535 申请日期 2000.12.04
申请人 SEIKO EPSON CORPORATION;CAMBRIDGE UNIVERSITY TECHNICAL SERVICES LIMITED 发明人
分类号 B41J2/16;B05D1/18;C23C26/00;H01L51/00;H01L51/30;H01L51/50;H05B33/10 主分类号 B41J2/16
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