Method and apparatus for monitoring charge neutralization operation

摘要

The current flowing through the electrode is monitored such that there is no passage of ion beams in that region. The monitored current level is compared with a predetermined level to determine available charge neutralization electron current. A target electrode (220) positioned to collect neutralizing electrons in biased with a suitable voltage. Plasma containing neutralizing electrons is produced in the region through which ion beam passes. Plasma is introduced into the interior region of passage body which is electrically connected to chamber during treatment of workpieces with ion beam.