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发明名称
USE OF VARIABLE IMPEDANCE HAVING ROTATING CORE TO CONTROL COIL SPUTTER DISTRIBUTION
摘要
申请公布号
EP1068631(A1)
申请公布日期
2001.01.17
申请号
EP19990914108
申请日期
1999.03.25
申请人
APPLIED MATERIALS, INC.
发明人
STIMSON, BRADLEY, O.;SMYTH, KENNETH;GOPALRAJA, PRABURAM
分类号
H05H1/46;C23C14/34;H01F21/06;H01F29/10;H01J37/32;H01J37/34;H01L21/203;H03H7/38;H03H7/40;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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