| 摘要 |
<p>PROBLEM TO BE SOLVED: To arbitrarily utilize a p-polarization component and an s-polarization component. SOLUTION: A laser irradiation apparatus 10 includes a polarizing beam splitter 16 and the laser beam passed through a variable attenuator 14 is split into two orthogonal polarized beams by the polarizing beam splitter 16. The laser beam of a p-polarization component transmitted through the polarizing beam splitter 16 is rotated by 90 in polarization plane centering around an optical axis by a 1/2 wavelength plate and, therefore, laser beam of an s- polarization component is allowed to be incident on a work. The laser beam of the s-polarization component reflected from the surface of the polarizing beam splitter 16 is reflected by a mirror 20 to be incident on the work. Therefore, both surfaces of the work can be washed at once and two works of the same kind can be washed at the same time. When the 1/2 wavelength plate is inserted between the mirror 20 and the work, laser beam of the p-polarization component can be utilized. Therefore, two works of the same kind can be processed at the same time.</p> |
