| 摘要 |
PROBLEM TO BE SOLVED: To accurately form an ink supply passage by a simple process, and to reduce in size and cost by providing the passage for supplying an ink to a liquid chamber at the bottom of a liquid chamber of an ink jet head. SOLUTION: The ink jet head comprises a diaphragm/liquid chamber substrate 1 using an Si substrate having, for example, a crystal surface orientation (110), an electrode substrate 2 using an Si substrate having, for example, a crystal surface orientation in plane (100) provided at a lower side of the substrate 1, and a nozzle plate provided at an upper side of the substrate 1. A recess for forming each liquid chamber 6, a diaphragm 7 for forming a bottom of the chamber 6, and a through hole for forming an ink supply hole 8 of an ink supply passage provided at the bottom of the chamber 6 are formed on the substrate 1. Meanwhile, a common in chamber 10 for supplying an ink to the each chamber 6 is formed in the substrate 2. Thus, the ink supply passage and a fluid resistance portion from the chamber 11 to the chamber 6 can be accurately formed, and a stable ink droplet discharge is guaranteed.
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