发明名称 Optical film thickness measuring device
摘要 Optical thickness measuring device comprising several light sources (2a-2n), being each one's light individually transmitted to the sample (31) by means of separated illumination optic fibers (26a-26n). Light reflected at the sample is picked up by a second set of optic fibers (27a-27n) in an Y arrangement with illumination fibers, and addressed (24) to spectrometer unit (23). Light sources or transmitting fibers are sequentially switched so that signal from a single sample point reaches the detector at a time. Sample is rotated by a support (29), and measuring points are distributed at different radii (Ra-Rn). Use of device for control of coating of digital video discs (DVD).
申请公布号 EP1069401(A1) 申请公布日期 2001.01.17
申请号 EP19990202293 申请日期 1999.07.13
申请人 ODME INTERNATIONAL B.V. 发明人 HOFFMANN, ERICH;KROBOK, MARTIN-PAUL
分类号 G01B11/06 主分类号 G01B11/06
代理机构 代理人
主权项
地址