| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a zinc oxide film excellent in electric conductivity and transparency by applying heating treatment to a zinc oxide film having respectively specified film thickness, visible ray transmissivity, and specific resistance value and prepared by means of plating by wet method. SOLUTION: The zinc oxide film has >=0.05μm film thickness, >=70% average transmissivity of visible ray, and <=0.1Ω.cm specific resistance value. It is preferable that heating temperature is 150-700 deg.C, heating atmosphere is in the air, in nonoxidizing-gas atmosphere, or in atmosphere of gaseous mixture thereof, and the transparent conductive zinc oxide film is for a transparent electrode. The zinc oxide film can be formed on a base material by electroless plating or electroplating as plating by wet method. NESA glass, ITO glass, metal sheet, etc., can be used for a conductive substrate; as a nonconductive substrate, those of plastics, glass, ceramics, etc., can be cited. The formation of the electroless plated zinc oxide film on the base material is performed through the steps of cleaning, surface preparation, application of catalyst, and preparation of film.</p> |
