发明名称 GEAR BOX IN POLISHING DEVICE
摘要 PROBLEM TO BE SOLVED: To centralize plural driving shafts in a gear box for centralizing the plural driving shafts, and to reduce the setting area of the whole device by sandwiching as holder between rotary upper/lower surface plates, and constituting the holder itself so as to be rotatable by a sun gear and an internal gear. SOLUTION: Plural output shafts are arranged in a gear box body 4 on a same rotational axis, end parts are centralized, the respective output shafts are projected in the different lengths from an upper part, a rotary driving part is driven by these respective output shafts, and a driving source for drive transmitting to the respective output shafts is arranged around a gear box 2 to transmit the driving by a pulley 8 and a belt 10. An output shaft having the rotational axis different from the plural output shafts is arranged in the gear box body 4 to be connected to the other rotational driving part of a polishing device, and a driving source for transmitting driving to this output shaft is arranged around the gear box to transmit the driving by the pulley and the belt. A space can be narrowed by using this gear box.
申请公布号 JP2001009714(A) 申请公布日期 2001.01.16
申请号 JP19990181726 申请日期 1999.06.28
申请人 SPEEDFAM CO LTD 发明人 YASHIKI HIROSHI;KOIKE YOSHIO;TAKEUCHI KOJI
分类号 B24B47/12;(IPC1-7):B24B47/12 主分类号 B24B47/12
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