| 摘要 |
PROBLEM TO BE SOLVED: To improve efficiency and accuracy without impairing properties of a polishing object bottom part surface by selecting a specific shape, Moh's hardness, the maximum particle size and the average particle size according to the material of a workpiece and a work pitch. SOLUTION: In an abrasive, a partition wall is formed at a prescribed interval by blasting a base board provided with an electrode and a blasting low melting point glass layer arranged on the base board. The abrasive is composed of inorganic particle powder satisfying an expression [I] 10<A<0.8C, an expression [II] 0.03C<B<0.5C, an expression [III] 40<C<500, an expression [IV] 30<D<95 and an expression [V] E2-3.5<E2-0.5 (in the expressions, A is the maximum particle size (μm) of the abrasive, B is the average particle size (μm), C is a work pitch and a partition wall width +a grinding grove width (μm), D is an index (%) for showing an undefined shape of a particle, E1 is Moh's hardness of the abrasive and E2 represents lower Moh's hardness of either of the base board or the electrode). Thus, the abrasive of excellent work efficiency and work accuracy can be applied without impairing surface properties of a workpiece.
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